High-Speed-Microscopy for quality control

Lightning-fast recording of large areas with microscopic resolution

© Fraunhofer IPT
Automatic full-surface examination of a wafer for microscopic structures under the High-Speed-Microscope

With High-Speed-Microscopy, large-area objects can be acquired in a very short time on a microscopic scale. In industries such as semiconductors, electronics and biology, the demand for microscopic inspection methods is particularly high, as the increasing inspection of large surfaces requires an ever faster acquisition process.

In contrast to conventional stop-and-go operation, high-speed microscopy allows the object to move continuously during the recording process. This allows the sample to be digitized at very high frame rates - more than 500 fps depending on the camera. Synchronous flash illumination avoids motion blur. During the continuous scanning process, real-time hardware autofocus systems automatically adjust the focus so that the sample is sharply imaged at any point.

The Fraunhofer IPT is working on accelerating the acquisition process even further and regularly selects new components for fast image acquisition, such as lighting, sensors for hardware autofocus systems and camera technology.

Software for real-time data recording with RAM recording, which was developed at the Fraunhofer IPT specifically for high-speed microscopy, ensures that image pre-processing and stitching run without delay thanks to GPU processing. Generated large-scale images can be evaluated with specially developed image processing algorithms. Actual developments aim at the use of machine learning methods like Deep Learning and Convolutional Neuronal Networks (CNN).

Our services

  • Development of high-throughput microscopy solutions with customized software
  • Integration of special lighting systems
  • Individual image data evaluation
  • Integration into automated systems
  • High-speed imaging processes


Electronics and
wafer manufacturing

With the individually adaptable software of the Fraunhofer IPT, both individual assemblies and entire wafers can be examined for microscopic defects and automatically evaluated. Special types of illumination can be integrated.


With phase-contrast-, fluorescence-, transmitted-light- and reflected-light-microscopy, high-speed microscopy can very quickly capture entire cell culture vessels and slides and thus produce a complete image.

Microstructure manufacturing

Large-area microstructures can be scanned very quickly with high-speed microscopy. Inline image recognition is possible.



Phase contrast is one of the most important microscopy methods for making transparent, unstained cells visible. Adaptive phase contrast microscopy magnifies the visible area many times over.


A high-speed microscope allows the complete recording of microtiter-plates in less than one minute. Image evaluation using deep learning already allows the classification of induced pluripotent stem cells.


The High-Speed-Microscope enables the complete recording of microtiter plates in less than one minute with fluorescence measurement and TDI-Scanning.